JPH0316655U - - Google Patents
Info
- Publication number
- JPH0316655U JPH0316655U JP7842089U JP7842089U JPH0316655U JP H0316655 U JPH0316655 U JP H0316655U JP 7842089 U JP7842089 U JP 7842089U JP 7842089 U JP7842089 U JP 7842089U JP H0316655 U JPH0316655 U JP H0316655U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- ion beam
- ion
- partition plate
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 4
- 238000000992 sputter etching Methods 0.000 claims description 4
- 239000000428 dust Substances 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims 4
- 238000005530 etching Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7842089U JPH0316655U (en]) | 1989-07-03 | 1989-07-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7842089U JPH0316655U (en]) | 1989-07-03 | 1989-07-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0316655U true JPH0316655U (en]) | 1991-02-19 |
Family
ID=31621676
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7842089U Pending JPH0316655U (en]) | 1989-07-03 | 1989-07-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0316655U (en]) |
-
1989
- 1989-07-03 JP JP7842089U patent/JPH0316655U/ja active Pending